High-purity specialized gas for high-tech applications, particularly in the semiconductor industry. This CO₂ is refined to purity levels of 99.999% or higher, ensuring minimal impurities that could interfere with sensitive electronic processes. Essential for chemical vapor deposition, plasma etching, and other semiconductor manufacturing techniques.

Technical Features

• Advanced Purification Technology: Utilizes cryogenic distillation and physical-chemical adsorption processes to ensure high purity

• Stable Product Purity: Delivers carbon dioxide with purity levels exceeding 99.9%, with very low levels of impurities such as CO and H₂

• High Automation Level: System supports network remote monitoring and unattended operations

• Low Raw Material Loss: Process design focuses on energy recovery, resulting in low production losses

• Flexible Process Design: Processes customizable according to customer needs

Industrial Applications

• Electronics Industry: Used as laser gas for laser cutting machines and cooling agent for electronic components

• Semiconductor Manufacturing: Acts as crucial gas in oxidation, diffusion, and chemical vapor deposition processes

• Medical Field: Applied in technologies such as supercritical extraction

• Photovoltaics and LEDs: Provides high-purity gases for integrated circuit and LCD panel production

• Industrial Applications: Widely utilized in various reactions and processing operations in high-tech sectors